The MAIA3 is an ultra-high resolution FE-SEM with remarkable imaging capabilities in the whole range of beam energies.
A multifaceted detection system and high resolution allows the observation of even the finest surface details.
This is an essential feature for comprehensive characterisation of nanomaterials, for studying of beam-sensitive samples and for imaging of non-conductive samples like uncoated biological specimens.
Key features:
- TriLens system: unique combination of three lens and crossover-free beam path
- Advanced detection system with multiple TriSE and TriBE detectors
- Ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
- EquiPower thermal power dissipation system for electron column stability
- Rapid beam energy changes and currents up to 400 nA
- Extended low-vacuum mode with chamber pressures up to 500 Pa for imaging of non-conducting specimens
- Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies (down to 50 eV)