Description

The SC7620 is a compact entry-level SEM sputter coater. When combined with the optional SC7620-CF carbon fibre evaporation attachment it makes the ideal low-cost SEM sputtering and carbon coating system package for quality thin film deposition.

 

Additionally, It’s fitted as standard with a glow discharge function, making it suitable for the hydrophilisation (or ’wetting’) of carbon-coated TEM grids and for other surface modifications.

Key features

  • - Simple operation
  • - Compact design, small footprint
  • - Glow discharge capability
  • - Carbon fibre evaporation option
  • - Adjustable height specimen stage
  • - Easy-change sputter targets - gold/palladium (Au/Pd) standard
  • - Extended warranty option
Attributes

Specifications

Instrument case 340mm W x 310mm D x 330mm H
including chamber
Weight 20kg
Work chamber Borosilicate glass,100mm ID mounted on a aluminium collar
target Disc style 57mm Ø gold/palladium target
Specimen stage 89mm diameter, height-adjustable (normal working distance: 45mm). No rotation or tilt

Vacuum system

Vacuum pump requirement 50L/m two-stage rotary pump with oil mist filter
Vacuum measurement Pirani gauge with analogue display
Typical ultimate vacuum 2x 10^-2 mbar in a clean system

accessories

Timer Manually by a 180 second analogue timer with 15 second resolution
Glow Discharge Operates at 100mA in DC + mode and 30mA in DC- mode
Gas System Argon sputtering process gas, 99.999% purity recommended
Display ---

Other accessories

Carbon evaporation Carbon fibre cord
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