VEGA Introduced 16 years ago, It was the first SEM system delivered by TESCAN now matured in the third generation. VEGA3 is a thermionic emission SEM system that comes either with tungsten heated filament or lanthanum hexaboride (LaB6) as electron source.
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Description

VEGA3 is a versatile system intended for both low and high vacuum operations providing users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or scripting for user-defined applications. In addition, by means of powerful turbo-molecular and rotary vacuum pumps, optimum operating vacuum is reached within few minutes.

Key Features:

 Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation ("Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way).

- The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment

- Real time IN-Flight Beam Tracing for performance and beam optimisation integrating the Well-estabilished software Electron Optical Design.

- High-throughput large-area automation, e.g. automated particles location and analysis.

- Superior specimen using a fully Motorized Compucenteric Stage.

- Perfect geometry for EDX, WDX, EBSD, non-distorted EBSD pattern

- Powerful turbomolecular and rotary fore vacume pump for fast and easy obtaining of clean chamber vacume.

- 4 diffrent chamber sizes: SB, LM, XM and GM.

- Unique live stereoscopic imaging utilizing the 3D Beam Technology.

Attributes

SB Chamber

Internal Size 160mm
Door (120mm (Wigth
Number of Ports 10
Type Eucentric 3-axis motor
Max Specimen Height 36/34mm

LM Chamber

Internal Size 230mm
Door (148mm (Width
Number of Ports 11
Type Compucentric
Max Specimen Height 54mm with rotation stage
81mm without rotation stage

XM Chamber

Internal Size 290mm × 340mm
W × D
Door 290mm × 322mm
W × H
Number of Ports 12
Type Compucentric
Max Specimen Height 106mm with rotation stage
147mm without rotation stage

GM Chamber

Internal Size 340mm × 315mm
W × D
Door 340mm × 320mm
W × H
Number of Ports 20
Type Compucentric
Max Specimen Height 106mm with rotation stage
147mm without rotation stage

Detectors

SE Yes
Retractable BSE Yes
LVSTD Optional
STEM Optional
CL Optional
Easy EDX Optional
EDX Optional
WDX Optional
EBSD Optional

Accessories

PA Meter Yes
Touch Alarm Yes
IR TV Camera Yes
Peltier Cooling Stage Optional
Control Panel Optional
Beam Blanker Optional
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