Description

LYRA3 is a dual beam system that combines a high-resolution FE-SEM column.

LYRA3 is an excellent choice for preparing cross-sections, site-specific high-quality TEM lamellae and, high-resolution FIB-SEM tomography for 3D sample reconstructions.

Users can gain from the excellent resolution at high beam currents which is useful for analytical applications such as EDX, WDX and EBSD.

LYRA3 is perfect choice for sample characterisation and microanalysis.

Also, easy-to-use software allows even beginner users to Easily use complex FIB-SEM applications such as 3D reconstructions, serial cross-sectioning and lamellae preparation

 

Key Features:

Unique Wide Field Optics design with a proprietary Intermediate Lens (IML) offering a different working and displaying modes.
- Fully automated electron optics set up and alignment

- Fast imaging rate

Real time In-Flight Beam Tracing (for beam optimization and direct and continuous control of the beam spot size and beam current.)

- Unique live stereoscopic imaging using the advanced 3D Beam Technology

- High performance CANION FIB for fast and precise cross sectioning and TEM sample preparation.

- Ultra-high resolution COBRA-FIB column represents the highest level of technology in resolution

 

Attributes

XM Chamber

Internal Size 285mm × 340mm
W × D
Door 285mm × 320mm
W × H
Number of Ports 12
Type Compucentric
Max Specimen Height 139mm

GM Chamber

Internal Size 340mm × 315mm
W × D
Door 340mm × 320mm
W × H
Number of Ports 20
Type Compucentric
Max Specimen Height 139mm

Detectors

SE Yes
Retractable BSE Yes
BDT Optional
In-Beam SE Optional
In-Beam BSE Optional
LVSTD Optional
STEM Optional
CL Optional
EDX Optional
WDX Optional
EBSD Optional

Accessories

Prob Current measurement Yes
Touch Alarm Yes
Chamber view camera Yes
Peltier Cooling stage Optional
Beam blanker Optional
Control Panel Optional
Gas Injection Sys Optional 1 or 5 gases

Electron Optics

Electron Gun High Brightness Schottky Emitter
Prob Current 2pA to 200nA

Ion Optics

Ion Column Canion/Cobra
Ion Gun Ga Liquid Metal Ion Source
Prob Current 1pA to 40nA / 1pA to 50nA
SEM-FIB angle 55degree

Vacuum Sys

Chamber High vacuum Mode: <5×10^-4 Pa
Low vacuum Mode: 7-500 Pa
Electron Gun 7-^10×3>
FIB Gun 6-^10×5>
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